Monolithic integration of a smart temperature sensor on a modular silicon-based organ-on-a-chip device

One of the many applications organ-on-a-chip (OOC) technology is study biological processes in human induced pluripotent stem cells (iPSCs) during pharmacological drug screening. It paramount importance to construct OOCs equipped with highly compact situ sensors that can accurately monitor, real time, extracellular fluid environment and anticipate any vital physiological changes culture. In this paper, we report co-fabrication a CMOS smart sensor on same substrate as our silicon-based OOC for real-time temperature measurement cell The proposed circuit developed provide first monolithically integrated temperature-sensing system micromachined device. Measurement results wafer reveal resolution less than ±0.2 °C nonlinearity error 0.05% across range from 30 40 °C. sensor's time response more 10 times faster constant convection-cooling mechanism found medium containing 0.4 ml PBS solution. All all, work step towards realizing seamless CMOS-based capable measure, multiple physical quantities culture experiments. expected use commercial foundry may enable very large scale multi-sensing integration actuation closed-loop manner.